JPH02122068U - - Google Patents
Info
- Publication number
- JPH02122068U JPH02122068U JP3238189U JP3238189U JPH02122068U JP H02122068 U JPH02122068 U JP H02122068U JP 3238189 U JP3238189 U JP 3238189U JP 3238189 U JP3238189 U JP 3238189U JP H02122068 U JPH02122068 U JP H02122068U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- setting table
- wafer setting
- processing liquid
- serves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electroplating Methods And Accessories (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3238189U JPH02122068U (en]) | 1989-03-22 | 1989-03-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3238189U JPH02122068U (en]) | 1989-03-22 | 1989-03-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02122068U true JPH02122068U (en]) | 1990-10-04 |
Family
ID=31258837
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3238189U Pending JPH02122068U (en]) | 1989-03-22 | 1989-03-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02122068U (en]) |
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1989
- 1989-03-22 JP JP3238189U patent/JPH02122068U/ja active Pending